| CVD / Diffusion Gas | ||
| Product | 中文 | Spec. |
| NH3 | 氨氣 | 6N4 |
| NO | 一氧化氮 | 3N5 |
| N2O | 一氧化二氮 | 5N5 |
| C3H6 | 丙烯 | 5N |
| C3H8 | 丙烷 | 5N |
| DCS | 二氯矽烷、二氯硅烷 | 4N |
| TCS | 三氯氫矽、三氯氫硅 | 4N |
| SiH4 | 矽烷、硅烷 | 6N |
| Si2H6 | 乙矽烷、乙硅烷 | 4N8 |
| GeH4 Mix | 四氫化鍺混氣、甲鍺烷混氣 | 6N/6N |
| WF6 | 六氟化鎢 | 5N5 |
| POCl3 | 三氯氧磷 | 7N |
| Trans LC | 二氯乙烯 | 7N5 |
| C2H2 | 乙炔 | 4N |
| BBR3 | 三溴化硼 | 5N |
