Lon Implantation Special Gases

Special Gases Used in Semiconductor Processes: Ion Implantation / Mixing

Implant / Doping Gas
Product	Scientific name	Spec.
BF3	Boron Trifluoride	5N
B2H6 Mix	Ethylborane Mixture	4N
TMB Mix	Tetramethylbenzenamine Mixture	3N/6N
PH3 Mix	Phosphine Mixture	6N/6N

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