| CVD / Diffusion Gas | ||
| Product | scientific name | Spec. |
| NH3 | Ammonia | 6N4 |
| NO | Nitric Oxide | 3N5 |
| N2O | Nitrous Oxide | 5N5 |
| C3H6 | Propene | 5N |
| C3H8 | Propane | 5N |
| DCS | Dichlorosilane | 4N |
| TCS | Trichlorosilane | 4N |
| SiH4 | Silane | 6N |
| Si2H6 | Ethylsilane | 4N8 |
| GeH4 Mix | Germane Gas Mixture | 6N/6N |
| WF6 | Tungsten Hexafluoride | 5N5 |
| POCl3 | Phosphoryl chloride | 7N |
| Trans LC | Dichloroethene | 7N5 |
| C2H2 | Acetylene | 4N |
| BBR3 | Boron Tribromide | 5N |
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