| Etching / Cleaning Gas | ||
| Product | Scientific name | Spec. |
| CHF3 | Trifluoromethane | 5N |
| CF4 | Carbon Tetrafluoride | 5N |
| C2F6 | Hexafluoroethane | 5N |
| C3F8 | Octafluoropropane | 5N |
| C4F6 | Hexafluorobutadiene | 3N5 |
| C4F8 | Octafluorocyclobutane | 5N |
| F2 Mix | Difluoromix | 3N/6N |
| BCl3 | Boron Trichloride | 5N |
| SiF4 | Silicon Tetrafluoride | 5N |
| HBr | Hydrogen Bromide | 5N |
| HF | Ydrogen Fluoride | 5N |
| HCl | Hydrogen Chloride | 3N/5N5 |
| Cl2 | Chlorine | 5N5 |
| NF3 | Nitrogen Trifluoride | 4N/4N5 |
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