| CVD Precursor | ||
| Product | Scientific name | Spec |
TEOS | Tetraethoxysilane | 9N |
| TEPO | Triethyl Phosphate | 7N5 |
| TEB | Triethyl Borate | 7N5 |
| TMPO | Trimethyl Phosphate | 8N |
| SiCl6 | Hexachlorosilane | 6N |
| BTBAS | Bis(t-butylamino)silane | 6N |
| TDMAT | Titanium tetramethylamine | 6N |
| 4MS | Tetramethylsilane | 6N |
| HCDS / Si2Cl6 | Hexachloroethyldisilane | 3N |
| HMDS | Hexamethyldisilazane | 3N |
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