| Excimer Laser Gas | ||
| Product | scientific name | Spec |
| 3.5% Ar/10ppm Xe/Ne | Phosphine Mixture | 6N/5N/5N |
| 0.95% F2/3.5% Ar/Ne | Fluorine/Argon/Neon | 3N/6N/5N |
| 1.25% Kr/Ne | Krypton/Neon Mixture | 5N/5N |
| 0.95% F2/1.25% Kr/Ne | Fluorine/Krypton/Neon | 3N/5N/5N |
| Xe | Xenon | 5N |
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